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Informationen zum Autor Wai Kin Chim is the author of Semiconductor Device and Failure Analysis : Using Photon Emission Microscopy , published by Wiley. Klappentext Integrierte Schaltkreise werden immer komplexer - deshalb wird es zunehmend schwieriger, Fehler schnell und treffsicher aufzuspüren. Die Photonenemissionsmikroskopie (PEM) ist eine Analysetechnik auf physikalischer Grundlage, die sich als Fehlererkennungsmethode bewährt hat. Dieser Band erläutert alle Aspekte dieser Methode, von der instrumentellen Ausrüstung über spezifische Details der Mikroskope bis hin zu Merkmalen der Photonenemission unter verschiedenen Bedingungen. (11/00) Zusammenfassung Fault detection has become increasingly difficult as integrated circuits become more and more complex. Photon Emission Microscopy (PEM) is a physical failure analysis technique which locates and identifies faults in integrated circuits. Inhaltsverzeichnis Preface. Introduction. Theory of Light Emission in Semiconductors. Instrumentation Aspects of the Photon Emission Microscope. Backside Photon Emission Microscopy. Spectroscopic Photon Emission Microscopy. Photon Emission from Metal-Oxide-Semiconductor Field-Effect Transistors under Hot-Carrier Stressing. Photon Emission from Metal-Oxide-Semiconductor Field-Effect Transistors under High-Field Impulse Stressing. Oxide Degradation and Photon Emission from Metal-Oxide Semiconductor Capacitor Structures. Index.
List of contents
Preface.
Introduction.
Theory of Light Emission in Semiconductors.
Instrumentation Aspects of the Photon Emission Microscope.
Backside Photon Emission Microscopy.
Spectroscopic Photon Emission Microscopy.
Photon Emission from Metal-Oxide-Semiconductor Field-Effect Transistors under Hot-Carrier Stressing.
Photon Emission from Metal-Oxide-Semiconductor Field-Effect Transistors under High-Field Impulse Stressing.
Oxide Degradation and Photon Emission from Metal-Oxide Semiconductor Capacitor Structures.
Index.
Report
"This reference details the principles of design, calibration, and useof photon emission microscopy (PEM) as a fault localization technique used for analyzing device reliability and failure." (SciTech Book News Vol. 25, No. 2 June 2001)
