Nanopositioning Technologies - Fundamentals and Applications

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

List of contents

1.A review of Stick-Slip Nanopositioning Actuators.- 2. Piezoelectric Motor Technology - A Review.- 3.Design of High-speed Nanopositioning Systems.- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism.- 5.Electro-magnetic Nano Positioning.- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis.- 7. Tracking Control for Nanopositioning.- 8.Position Sensors for Nanopositioning.- 9. MEMS Nanopositioners.- 10.Control Issues of MEMS nanopositioning devices.- 11. A Review of Nanomanipulation in Scanning Electron Microscopes.- 12. Nanopositioning for lithography and data storage.

Summary

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Product details

• Assisted by: Xiny Liu (Editor), Xinyu Liu (Editor), Xin-yu Liu (Editor), Changhai Ru (Editor), Yu Sun (Editor)
• Publisher: Springer, Berlin
• Languages: English
• Product format: Paperback / Softback
• Released: 01.01.2018
• EAN: 9783319795393
• ISBN: 978-3-31-979539-3
• No. of pages: 409
• Dimensions: 155 mm x 22 mm x 235 mm
• Weight: 635 g
• Illustrations: VI, 409 p. 279 illus., 203 illus. in color.
• Subjects: Natural sciences, medicine, IT, technology > Technology > General, dictionaries; B, Robotics, engineering, Engineering Design, Technical design, Nanotechnology, Electronic devices & materials, Electronics, Microelectronics, Electronics and Microelectronics, Instrumentation, Control, Robotics, Mechatronics, Control, Robotics, Automation, Control engineering, Mechatronics, Microsystems and MEMS, Nanotechnology and Microengineering, Electronics engineering, Automatic control engineering