Fr. 94.80

Sami Fransilla, Franssila, S. Franssila, Sami Franssila

Introduction to Microfabrication

English · Paperback / Softback

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Description

Nanotechnology and microengineering are among the top priority research areas for the US and Europe. This text provides coverage of all aspects of the attempt to build functional devices at a molecular size.

List of contents

From the contents:
Preface. Acknowledgements.
PART I: INTRODUCTION.
PART II: MATERIALS.
PART III: BASIC PROCESSES.
PART IV: STRUCTURES.
PART V: INTEGRATION.
PART VI: TOOLS.
PART VII: MANUFACTURING.
PART VIII: FUTURE.
Appendix A: Comments and Hints to Selected Problems.
Appendix B: Constants and Conversion Factors.
Index

Product details

Authors	Sami Fransilla, Franssila, S. Franssila, Sami Franssila
Publisher	Wiley, John and Sons Ltd

Languages	English
Product format	Paperback / Softback
Released	20.04.2004

EAN	9780470851067
ISBN	978-0-470-85106-7
No. of pages	422
Subject	Natural sciences, medicine, IT, technology > Technology > Electronics, electrical engineering, communications engineering

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