Introduction to Microsystem Design

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

List of contents

Scaling Laws.- Elastic deformations.- Thin Films.- Conductor Paths.- Electrical Measurements.- Membranes.- Strain gauges on membranes.- Beams.- Vibrations.- Capillaries.- Capacitive forces.- Piezoelectric effect.- Thermal actuators.- Micro optics.- Diffusion.- Micro valves.- Micro pumps.- Micro dosing.- Analogies of physical domains.- Mechanical devices for electronics.

Summary

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

Product details

• Authors: Werner Karl Schomburg
• Publisher: Springer, Berlin
• Languages: English
• Product format: Paperback / Softback
• Released: 01.01.2016
• EAN: 9783662507339
• ISBN: 978-3-662-50733-9
• No. of pages: 374
• Dimensions: 156 mm x 236 mm x 23 mm
• Weight: 610 g
• Illustrations: XXIV, 374 p. 380 illus., 332 illus. in color.
• Series: RWTHedition; RWTHedition
• Subjects: Natural sciences, medicine, IT, technology > Technology > Electronics, electrical engineering, communications engineering; B, engineering, Circuits and Systems, Other manufacturing technologies, Nanotechnology, Electronics, Microelectronics, Electronics and Microelectronics, Instrumentation, Microsystems and MEMS, Nanotechnology and Microengineering, Electronic circuits, Electronic Circuits and Systems, Electronics: circuits & components