Nanofabrication - Principles and Applications

This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.

List of contents

Introduction.- Silicon Planar Processing and Photolithography.- Direct-write Lithography Approaches.- Stamping Methods.- Scanning-probe Methods.- Natural Lithography.- Direct-Growth and Self-assembly.- Practical Examples and Case Studies of Nanofabrication.

Summary

This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.

Product details

• Authors: Christo Papadopoulos
• Publisher: Springer, Berlin
• Languages: English
• Product format: Paperback / Softback
• Released: 01.01.2016
• EAN: 9783319317403
• ISBN: 978-3-31-931740-3
• No. of pages: 81
• Dimensions: 174 mm x 234 mm x 8 mm
• Weight: 154 g
• Illustrations: VI, 81 p. 41 illus., 31 illus. in color.
• Series: SpringerBriefs in Materials; SpringerBriefs in Materials
• Subjects: Natural sciences, medicine, IT, technology > Technology > Mechanical engineering, production engineering; Elektronik, C, Elektronische Geräte und Materialien, Nanowissenschaften, Chemistry and Materials Science, Nanotechnology, Nanoscale Science and Technology, Nanostructures, Nanoscale science, Nanophysics, Nanoscience, Electronic devices & materials, Electronics, Microelectronics, Electronics and Microelectronics, Instrumentation, Semiconductors, Electronics engineering