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This up-to-date handbook covers the main topics of preparation, characterization and properties of complex metal-based layer systems. The authors -- an outstanding group of researchers -- discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers. This second edition has been completely revised and updated to reflect the rapid progress taking place in the field, including, for example, investigations of the interface between barrier layer and dielectrics in metallization systems, spin-torque induced magnetic switching in spintronics, the development of new metallization technologies for migration-resistant SAW devices, and advancements in the nanoanalytics of thin functional layers.In addition, several new sections and chapters highlight new and timely research topics, with a whole chapter now devoted to photovoltaics.As such, the book addresses materials specialists in industry, especially in microelectronics, as well as scientists, while also recommended for advanced studies in materials science, analytics, surface and solid state science.
List of contents
- Thin Film Systems: Basic Aspects- Thin Film Preparation and Characterization Techniques- Thin Film Systems Characterization and Optimization- Devices
About the author
Klaus Wetzig studied physics at the University of Technology in Dresden, receiving his licence in 1963, his doctorate in 1967 and his habilitation in 1973. In 1975 he moved to the Academy of Sciences, and since 1992 he is Full Professor of Materials Analysis at the University of Technology in Dresden and Director at the Leibniz Institute of Solid State and Materials Research Dresden. His research interests include materials analysis and microstructures, especially electron microscopy of functional materials, characterization of thin films for electronics, and nanostructural features in general.
Claus Michael Schneider studied physics at the Institute of Technology Aachen receiving his diploma in 1985. He obtained his PhD in 1990 at the Free University of Berlin and his habilitation in 1996 at the Martin-Luther-University Halle. In 1998 he moved to the Leibniz Institute of Solid State and Materials Research Dresden, heading the department of thin film systems and nanostructures. In June 2003 he was appointed director at the Institut für Festkörperforschung (IFF-IEE) of the Forschungszentrum Jülich. His research interests include solid state physics, thin film systems and surface magnetism as well as the physics of nanostructures.
Summary
This up-to-date handbook covers the main topics of preparation, characterization and properties of complex metal-based layer systems. The authors -- an outstanding group of researchers -- discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers.
This second edition has been completely revised and updated to reflect the rapid progress taking place in the field, including, for example, investigations of the interface between barrier layer and dielectrics in metallization systems, spin-torque induced magnetic switching in spintronics, the development of new metallization technologies for migration-resistant SAW devices, and advancements in the nanoanalytics of thin functional layers.
In addition, several new sections and chapters highlight new and timely research topics, with a whole chapter now devoted to photovoltaics.
As such, the book addresses materials specialists in industry, especially in microelectronics, as well as scientists, while also recommended for advanced studies in materials science, analytics, surface and solid state science.
Report
"...ist das Buch sowohl in seiner Praxisorientierung als auch in seiner didaktischen Gestaltung auf den Praktiker zugeschnitten. Es kann jedem Werkstofftechniker, Physiker oder Prozessingenieur, der auf dem immer noch aufregenden Gebiet der Mikroelektronik tätig ist oder tätig werden will, wärmstens empfohlen werden."Vakuum in Forschung und Praxis 2/04
