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Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.
Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.
Prof. Yafei Zhang is the director of the Ministry of Education's Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang's research group.
List of contents
Introduction.- Propagation of Acoustic Wave in Crystals.- The Theory of FBAR.- The Sputtering Deposition and Etching of AlN Film.- The Membrane Structured FBAR.- Solidly Mounted Acoustic Resonator.- The Application of FBAR in RF Filters.- The FBAR Excited by Lateral Filed.- High Sensitive Sensors Based on FBAR.
About the author
Da Chen, Jg. 1962, wuchs in einem kleinen chinesischen Dorf auf. Seine Familie war, als ehemalige Landbesitzer, politischen Repressalien ausgesetzt. Dennoch studierte er an der Universität Peking und wurde Dozent für Englisch. Mit 23 Jahren ging Da Chen in die USA und studierte mit Hilfe eines Stipendiums Jura an der Columbia University. Heute lebt er mit seiner Frau und zwei Töchtern in der Nähe von New York.
Summary
Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.
Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.
Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.
