Doping Engineering for Front-End Processing: Volume 1070

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

List of contents

Preface; Part I. Ultra Shallow Junctions I; Part II. Shallow Junction Contacting; Part III. Poster Session; Part IV. Ultra Shallow Junctions II; Part V. Solid Phase Epitaxial Regrowth; Part VI. Modeling and Simulation; Author index; Subject index.

Product details

• Authors: B. J. Pawlak, B. J. Pelaz Pawlak
• Assisted by: M. Law (Editor), Law M. (Editor), B. J. Pawlak (Editor), Pawlak B. J. (Editor), M. L. Pelaz (Editor), Pelaz M. L. (Editor), Surugo K. (Editor)
• Publisher: Cambridge University Press ELT
• Languages: English
• Product format: Paperback / Softback
• Released: 05.06.2014
• EAN: 9781107408548
• ISBN: 978-1-107-40854-8
• No. of pages: 336
• Series: MRS Proceedings; MRS Proceedings
• Subjects: Natural sciences, medicine, IT, technology > Technology > Miscellaneous; Materials science, TECHNOLOGY & ENGINEERING / Materials Science / General, Electronic devices and materials, Semi-conductors & super-conductors