Modelling of Microfabrication Systems

This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.

List of contents

1 Ion Beam.- 2 X-ray Lithography.- 3 Laser Chemical Vapor Deposition.- 4 Laser Photopolymerization.- 5 Laser Ablation.- 6 Thin Films.- References.

Summary

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

Additional text

From the reviews:

"This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). … the book provides a fairly complete view of the modeling of microfabrication processes. … ‘It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications’." (Grégory Guisbiers, Physicalia, Vol. 26 (1), 2004)

Report

From the reviews:

"This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). ... the book provides a fairly complete view of the modeling of microfabrication processes. ... 'It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications'." (Grégory Guisbiers, Physicalia, Vol. 26 (1), 2004)

Product details

• Authors: Weizhong Dai, Raj Nassar, Raja Nassar
• Assisted by: Weizhong Dai (Editor), Raja Nassar (Editor)
• Publisher: Springer, Berlin
• Languages: English
• Product format: Paperback / Softback
• Released: 11.10.2010
• EAN: 9783642055362
• ISBN: 978-3-642-05536-2
• No. of pages: 270
• Dimensions: 156 mm x 234 mm x 14 mm
• Weight: 429 g
• Illustrations: X, 270 p.
• Series: Microtechnology and MEMS; Microtechnology and MEMS
• Subjects: Natural sciences, medicine, IT, technology > Technology > General, dictionaries; Nanotechnologie, C, Optimization, Computermodellierung und -simulation, Numerische Mathematik, computer science, engineering, Nanotechnology, Electronics, Microelectronics, Electronics and Microelectronics, Instrumentation, Numerical analysis, Computer simulation, Computer modelling & simulation, Simulation and Modeling, Microsystems and MEMS, Nanotechnology and Microengineering, Electronics engineering, Computer Modelling