Silicide Technology For Integrated Circuits

Klappentext Silicide Technology for Integrated Circuits focuses on the task of developing and applying metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages and provides guidance on the application of the latest emerging technology. Zusammenfassung Silicide Technology for Integrated Circuits focuses on the task of developing and applying metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages and provides guidance on the application of the latest emerging technology. Inhaltsverzeichnis Chapter 1: Silicides - an introduction Chapter 2: Silicide formation Chapter 3: Titanium silicide technology Chapter 4: Cobalt silicide technology Chapter 5: Nickel silicide technology Chapter 6: Light-emitting iron disilicide Chapter 7: Silicide contacts for Si/Ge devices Chapter 8: Silicide technology for SOI devices Chapter 9: Characterisation of metal silicides

Product details

• Authors: Lih J. (EDT) Chen, Terry Thomas
• Assisted by: L. J. Chen (Editor), Lih J Chen (Editor), Lih J. Chen (Editor), Lih J. (National Tsing Hua University Chen (Editor)
• Publisher: Stylus Publishing
• Languages: English
• Product format: Hardback
• Released: 30.03.2005
• EAN: 9780863413520
• ISBN: 978-0-86341-352-0
• No. of pages: 279
• Dimensions: 191 mm x 248 mm x 19 mm
• Series: Processing; Materials, Circuits and Devices; Materials, Circuits and Device; Processing
• Subjects: Natural sciences, medicine, IT, technology > Technology > Electronics, electrical engineering, communications engineering; Social sciences, law, business > Sociology > Sociological theories