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This edition of CMOS-MEMS was originally published in the successful series Advanced Micro & Nanosystems . A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon
processing. An insider s view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass
data storage and electrochemical imaging by means of scanning micro- and nanoprobes.
The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.
List of contents
PREFACEEVALUATION OF MECHANICAL PROPERTIES OF MEMS MATERIALS AND THEIR STANDARDIZATIONELASTOPLASTIC INDENTATION CONTACT MECHANICS OF HOMOGENEOUS MATERIALS AND COATING?SUBSTRATE SYSTEMSTHIN-FILM CHARACTERIZATION USING THE BULGE TESTUNIAXIAL TENSILE TEST FOR MEMS MATERIALSON-CHIP TESTING OF MEMSRELIABILITY OF A CAPACITIVE PRESSURE SENSORINERTIAL SENSORSINERTIAL SENSORSRELIABILITY OF MEMS VARIABLE OPTICAL ATTENUATORECO SCAN MEMS RESONANT MIRRORINDEX
About the author
Oliver Brand is Professor of Bioengineering and Microelectronics/Microsystems at Georgia Institute of Technology, Atlanta, USA. He received his diploma degree in Physics from Technical University Karlsruhe, Germany, in 1990, and his PhD from ETH Zurich, Switzerland, in 1994. Between 1995 and 2002, he held research and teaching positions at the Georgia Institute of Technology (1995-1997) and ETH Zurich (1997-2002). Oliver Brand's research interest is in the areas of CMOS-based micro- and nanosystems, MEMS fabrication technologies, and microsystem packaging.
Gary K. Fedder is Professor of Electrical and Computer Engineering, Professor of The Robotics Institute and the Director of the Institute for Complex Engineered Systems (ICES) at Carnegie Mellon University, Pittsburgh, USA. He received the BSc and MSc degrees in electrical engineering from MIT in 1982 and 1984, respectively, and his PhD in 1994 from the University of California, Berkeley. His research interests include microelectromechanical systems (MEMS) modeling, simulation and synthesis, integration of MEMS and CMOS, microsensor design, microactuator control systems, and probe-based nanofabrication technologies.
Christofer Hierold holds the Chair of Micro- and Nanosystems at the ETH in Zurich, Switzerland, since April 2002. Prior to that, he spent eleven years with Siemens AG and Infineon Technologies AG, responsible for R&D on microsystems, advanced CMOS processes, memories, nanoelectronics and new materials. His current research work focuses on the evaluation of new materials for MEMS, on advanced microsystems and on nanotransducers. He holds numerous patents and has published over 20 research articles in peer reviewed journals and international conference proceedings. He serves on the program committees of several scientific conferences such as the IEEE MEMS series.
Jan G. Korvink holds a Chair for Microsystem Technology at the University of Freiburg, Germany, where he runs the laboratory for microsystem simulation. He has co-authored more than 100 papers in scientific journals and conference digests, as well as numerous book chapters and a book on semiconductors for engineers. His research interests cover the modeling and simulation of microsystems and the low-cost fabrication of polymer-based MEMS.
Osamu Tabata is Professor in the Department of Microengineering at Kyoto University. He received his MSc and PhD degrees from Nagoya Institute of Technology. From 1981 to 1996, he performed industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. He joined the Department of Mechanical Engineering of Ritsumeikan University in Shiga, Japan, in 1996, and the Department of Mechanical Engineering at Kyoto University in 2003. Osamu Tabata is engaged in the research of micro/nano processes, MEMS and micro/nano system synthetic engineering. He received numerous awards, including the Science News Award and the Research & Development Top 100 Award in 1993 and 1998.
Summary
This edition of 'Reliability of MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, one of the most important hurdles to commercialization for microelectromechanical systems is covered in detail: the reliability of MEMS materials and devices. Due to their microscale size combined with novel functionalities, a whole new category of challenges arises, and proper determination of a given device's reliability is instrumental in determining its range of usability and application fields. Any kind of gadget's performance, lifetime and safety will depend on the continued and predictable functioning of both the electronic as well as the micromechanical parts. MEMS reliability therefore can be as serious as human life-and-death matters - quite literally in the case of roll-over sensors for cars, for example.
