Microelectromechanical Systems - Materials and Devices

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

List of contents

Preface; Part I. Micromechanics I; Part II. Micromechanics II; Part III. Poster Session; Part IV. MEMS Devices I; Part V. MEMS Devices II; Part VI. Poster Session: MEMS; Part VII. MEMS Materials and Processes I; Part VIII. MEMS Materials and Processes II; Part IX. Select Paper from Symposium N; Author index; Subject index.

Summary

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Product details

• Assisted by: Mark G. Da Silva (Editor), D. Lavan (Editor), David A. Lavan (Editor), David. A LaVan (Editor), Mark G. da Silva (Editor), M. Spearing (Editor), S. Mark Spearing (Editor), Srikar Vengallatore (Editor)
• Publisher: Cambridge University Press
• Languages: English
• Product format: Hardback
• Released: 17.03.2008
• EAN: 9781558999909
• ISBN: 978-1-55899-990-9
• No. of pages: 342
• Dimensions: 157 mm x 235 mm x 23 mm
• Weight: 647 g
• Series: MRS Proceedings; Materials Research Society Sym
• Subject: Natural sciences, medicine, IT, technology > Technology > Electronics, electrical engineering, communications engineering