Microelectromechanical Systms v1139

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

List of contents

Part I. Materials and Processes for MEMS; Part II. Microdevices and Micro/Nanofluidics; Part III. Poster Session; Part IV. Micro/Nanomechanics; Part V. MEMS Reliability and Tribology; Author index; Subject index.

Summary

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Product details

• Assisted by: Jorg Bagdahn (Editor), Jörg Bagdahn (Editor), Jr Norman F. Sheppard (Editor), N. Sheppard (Editor), Norman F. Sheppard (Editor), Norman F. Sheppard Jr (Editor), S. M. Spearing (Editor), S. Mark Spearing (Editor), S. Vengallatore (Editor), Srikar Vengallatore (Editor)
• Publisher: Cambridge University Press
• Languages: English
• Product format: Hardback
• Released: 23.06.2009
• EAN: 9781605111117
• ISBN: 978-1-60511-111-7
• No. of pages: 264
• Dimensions: 157 mm x 235 mm x 19 mm
• Weight: 538 g
• Series: MRS Proceedings; MRS Proceedings
• Subject: Natural sciences, medicine, IT, technology > Technology > Miscellaneous