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Deposition and Growth: Limits for Microelectronics. AVS Series. Vol.4

English · Hardback

Description

Product details

Assisted by Gerald Lucovsky (Editor), Gary Rubloff (Editor)
Publisher Springer, Berlin
 
Languages English
Product format Hardback
Released 01.01.1997
 
EAN 9780883183670
ISBN 978-0-88318-367-0
Weight 770 g
Series AIP Conference Proceedings
AIP Conference Proceedings
Subject Natural sciences, medicine, IT, technology > Physics, astronomy > Electricity, magnetism, optics

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