Micro Mechanical Systems - Principles and Technology

Klappentext In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems. Inhaltsverzeichnis ¿ Introduction ¿ Photolithographic Microfabrication ¿ Micromaching by Machine Tools ¿ Tribological Aspects of Microsystems ¿ Silicon Microsensors ¿ Micro-Actuators for Micro-Robots: Electric and Magnetic ¿ Energy Source and Power Supply Method ¿ Control Method of Micro Mechanical Systems ¿ Examples of Microsystems ¿ Future Problems

List of contents

. Introduction

. Photolithographic Microfabrication

. Micromaching by Machine Tools

. Tribological Aspects of Microsystems

. Silicon Microsensors

. Micro-Actuators for Micro-Robots: Electric and Magnetic

. Energy Source and Power Supply Method

. Control Method of Micro Mechanical Systems

. Examples of Microsystems

. Future Problems

Product details

• Authors: T. Fukuda, T. (Nagoya University Fukuda, T. Menz Fukuda, W. Menz
• Assisted by: T. Fukuda (Editor), T. (Nagoya University Fukuda (Editor), Fukuda T. (Editor), Wolfgang Menz (Editor), Wolfgang (Johann Wolfgang Goethe-Universitat Menz (Editor), Menz Wolfgang (Editor)
• Publisher: ELSEVIER SCIENCE BV
• Languages: English
• Product format: Hardback
• Released: 24.07.1998
• EAN: 9780444823632
• ISBN: 978-0-444-82363-2
• No. of pages: 276
• Series: Handbook of Sensors and Actuators; Handbook of Sensors and Actuat; Handbook of Sensors and Actuat; Handbook of Sensors and Actuators
• Subjects: Natural sciences, medicine, IT, technology > Technology > Heat, energy and power station engineering; TECHNOLOGY & ENGINEERING / Mechanical, Mechanical Engineering, Materials science, TECHNOLOGY & ENGINEERING / Materials Science / General