The Physics of Micro/Nano-Fabrication

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Summary

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Product details

• Assisted by: Julius J. Muray (Editor), Ivor Brodie (Editor)
• Authors: Julius J. Muray, Ivor Brodie, Ivo Brodie, Julius J Muray
• Publisher: Springer, Berlin
• Content: Book
• Product form: Hardback
• Publication date: 25.06.2009
• Subject: Natural sciences, medicine, IT, technology > Physics, astronomy > Atomic physics, nuclear physics
• EAN: 9780306441462
• ISBN: 978-0-306-44146-2
• Pages: 622
• Illustrations: XX, 622 p.
• Dimensions (packing): 17.8 x 25.4 cm
• Weight (packing): 1,492 g
• Series: Microdevices; Microdevices
• Subjects: Elektrotechnik, Werkstoffprüfung, Optik, Mikroskopie, Spektroskopie, Technische Anwendung von elektronischen, magnetischen, optischen Materialien, Research, Optics, Festkörperphysik, Spektroskopie, Spektrochemie, Massenspektrometrie, chemistry, Physics