Nanotechnology - Integrated Processing Systems for Ultra Precision Ultra Fine

Klappentext The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometer range (approximately three atomic lattice spacings). This book, written by leading researchers in Japan, examines the technology and systems needed to achieve this level of accuracy. The underlying concept of nanotechnology systems comes from the prediction that the extremely high accuracy required in materials processing will ultimately reach the order of 1nm (nanometer). Since the distance between lattice atoms is about 0.3nm, this constitutes the limit in resolution for measurable or confirmable lengths of solid materials. This leads directly to processing at the atomic bit level at which sub-nm resolution becomes necessary. Nanotechnology is concerned with integrated processing systems for measurement, position control, and processing technologies in the sub-nm range. It will be essential in the fabrication of extremely precise and fine parts. Zusammenfassung The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leading researchers in Japan, that is: the world leaders.

Product details

• Authors: Taniguchi, Norio Taniguchi, Norio (Professor Emeritus Taniguchi
• Assisted by: Tsuguo Kohno (Editor), Kazuo Maruyama (Editor), Norio Taniguchi (Editor), Norio (Professor Emeritus Taniguchi (Editor), Taniguchi Norio (Editor), Toshio Dohi (Co-editor), Kiyoshi Iizuka (Co-editor), Tsuguo Kohno (Co-editor), Kazuo Maruyama (Co-editor), Iwao Miyamoto (Co-editor)
• Publisher: Oxford University Press
• Languages: English
• Product format: Hardback
• Released: 01.07.1996
• EAN: 9780198562832
• ISBN: 978-0-19-856283-2
• No. of pages: 422
• Series: Oxford Science Publications; Oxford Science Publications
• Subjects: Natural sciences, medicine, IT, technology > Technology > Miscellaneous; SCIENCE / Chemistry / Industrial & Technical, TECHNOLOGY & ENGINEERING / Industrial Engineering, TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS, TECHNOLOGY & ENGINEERING / Manufacturing, TECHNOLOGY & ENGINEERING / Measurement, Nanotechnology, Production engineering, Powder technology, Production and industrial engineering, Industrial chemistry and chemical engineering, Engineering measurement & calibration, Engineering measurement and calibration